Trevor Holden, Ashlin Linn and Philippa Goddard, From the Pages of the Sound Archive: Papers from the C10 Digital Library, London, 2002-2011 .
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Category:1962 deathsComponents such as resistors, capacitors, inductors and other passive components are often used as part of electrical circuits in IC chips. The resistors and other passive components typically take up area on a chip and may have specific values depending on the design of the chip. Passive components are typically placed on the IC chip and then a wiring structure is used to connect the passive components to different devices on the chip. Typically the passive components are on the chip at different locations and in different metallization levels and the devices on the chip are also connected together through different metallization levels. A typical approach is to connect the passive components to the devices through multiple vias.
The vias are first formed in a dielectric layer and then filled with conductive material. The vias are then electroplated with a conductive material (e.g., copper) to form a conductive via. However, the copper or other conductive material inside the vias may later migrate out of the vias (i.e., along the sidewalls and bottom of the vias). The migration of conductive material in the vias may result in electrical shorts and other problems. For example, the conductive material in the vias may short together, thereby causing a fail. As another example, a device connected to a via with a conductive material therein may not receive a required voltage because the conductive material migrates out of the via and the via is connected to the device.
The vias are typically filled with the conductive material in a separate process. The vias are then formed in the dielectric material in a separate process. The vias may be formed in a separate via layer and then filled with the conductive material. However, forming vias in a separate via layer is a complex process. The formation of vias in the separate via layer can be expensive.
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